[Article] A Study of the Effect of a Magnetic Field on by King A.S.

By King A.S.

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The physics of the deposition process was studied by examining the atomic beams of various species liberated from the target. It was found that the atomic beams could be described very well by a supersonic expansion mechanism. An interesting change in the velocity distribution of the various atomic beams as a function of distance from the target was also observed. This change could be correlated to the deposited film property and the optical target/substrate separation. 6x1Q6 crn/s. It is believed that this energetic oxygen atomic beam is responsible for the low temperature as- deposited superconducting film formation.

The procedure was similar to that used by Lee et a1. 9 , but the annealing temperature of our best films was lower than theirs by about 30°C. The film compositions were determined by x-ray fluorescence microprobe spectroscopy. 46Cu30x' The TI content was found to vary spatially by 20% about the film surface. OO mJ/pulse Generolor ilcolli Block Ab lalion Chomber Window AlJlolion ChomlJer (top Y,e .. ) / I O ~H'r Ileom Composite IUICJ<:1 Molor Figure 1. 00 2 Figure 2. 00 THETA X-ray diffraction pattern of TI-Ba-Ca-Cu-O films on i\IgO substrates (a) annealed at 870°C for 5 min.

Adrian, J. Appl. Phys. 63:2029 (1988). H. J. lanno, B. Johs, D. Thompson, D. 11cycr, and John A. \iVoollam Department of Electrical Engineering University of Nebraska - Lincoln Lincoln, Nebraska 68588-0511 ABSTRACT Pulsed Laser EYilporation (PLE) has been shown to produce sllpercoJl(lncting films of excellent quality. We will be discussing the results obtained from the PLE of TlBa-Ca-Cu-O using a frequency doubled N d:YAG laser operating at 532 11111. Films were deposited OIl SrTi0 3, MgO, yttrium stabilized Zr02, and polycrystalline Al 20 3 .

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